Parts catalog
Motors and parts for the 1000, 1100, and 1500
Filter by base unit and category to see what we supply. This is a representative list. If you have a part number that is not shown, ask us, we likely have it or can rebuild yours.
Parts finder
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Part numbers and compatibility vary with tool configuration and serial number. We confirm fit with you before every order.
Categories we cover
- Stage Motors
- X and Y stage drive motors that position the wafer under the lens.
- Focus & Leveling
- Z-axis and focus drive motors for keeping the image plane sharp.
- Wafer Handling
- Handler, prealign, and transfer motors that move wafers in and out.
- Reticle Handling
- Reticle changer and positioning motors and mechanisms.
- Illumination
- Shutter drives and lamp housing hardware for the exposure system.
- Encoders & Feedback
- Motor encoders and position sensors matched to their drives.
- Drive Electronics
- Motor driver and controller boards for the base unit.
- Cables & Harnesses
- Motor and signal cabling for replacement and rework.
Don't see your part?
Most of our inventory never makes it onto a web page. Send us the part number and we will check the shelf.