Ultratech Stepper 1000 · 1100 · 1500
Keep your 1X steppers stepping.
Strickland Machinery supplies rebuilt motors and replacement parts for Ultratech Stepper 1000, 1100, and 1500 base units, so legacy lithography tools stay in production instead of waiting on parts.
Shop by base unit
Ultratech
Stepper 1000
The original 1X stepper base unit. Motors and mechanisms rebuilt to keep long-running tools in production.
View 1000 parts
Ultratech
Stepper 1100
Shares much of its motion system with the 1000. We confirm fit for your serial number before anything ships.
View 1100 parts
Ultratech
Stepper 1500
A large-field 1X projection stepper still common in MEMS, packaging, and compound semiconductor fabs.
View 1500 parts
XY Servo Motors
Inland Servo Motor 3D Rendering
Servo Motor View 1: Upper View
Top-down isometric view of the assembled servo drive. Shows the rotor hub and its mounting bolt pattern seated inside the stator housing, the machined base block with its mounting and dowel holes, and the external fasteners and connector block. Numbered callouts identify each serviceable component.
Inland Servo Motor 3D Rendering
Servo Motor View 2: Cut Out View
Sectioned view through the motor centerline exposing the internal construction: the output shaft and rotor hub, the stator stack inside the outer housing, the bearing arrangement that supports the shaft, and the seals, spacers, and retaining hardware that set axial position. This is where wear shows up first and what we inspect on every rebuild.
Inland Servo Motor 3D Rendering
Servo Motor View 3: Bottom View
Underside view of the assembly showing the mounting bracket, the lower bearing housings, the drive coupling side of the motor, and the sensor and cable exit hardware. Useful for confirming mounting orientation and interface fit against your tool before a replacement ships.
Specialists in one family of tools
We do not try to support every stepper ever built. We focus on the Ultratech 1000, 1100, and 1500 base units and the motors that drive them, which means we know how these tools fail and what it takes to bring them back.
Whether you need a rebuilt stage motor tomorrow or want to send in a failed unit for repair, we work from your part number and serial number so the part fits the first time.
Send a part number01
Bench tested
Every motor is run and checked before it leaves the shop. Nothing ships untested.
02
Fit confirmed
We match your part number and tool configuration before quoting, not after it arrives.
03
Exchange available
Send in your core and get a rebuilt unit, keeping downtime and cost down.
04
Talk to a person
Call and speak with someone who knows these tools, not a ticket queue.
Tool down? Let's find the part.
Send the part number or a description of the failure and we will get back to you with availability and pricing.